XENON DIFLUORIDE
xenon difluoride
CAS: 13709-36-9
Molecular Formula: F2Xe
XENON DIFLUORIDE - Names and Identifiers
| Name | xenon difluoride |
| Synonyms | xenon fluoride Xenon fluoride Xenon difluoride xenon difluoride Difluoroxenon(II) xenon(2+) difluoride XENON(II) DIFLUORIDE Xenon fluoride (XeF2) |
| CAS | 13709-36-9 |
| EINECS | 237-251-2 |
| InChI | InChI=1/F2Xe/c1-3-2 |
| InChIKey | IGELFKKMDLGCJO-UHFFFAOYSA-N |
XENON DIFLUORIDE - Physico-chemical Properties
| Molecular Formula | F2Xe |
| Molar Mass | 169.29 |
| Density | 4.32 g/mL at 25 °C (lit.) |
| Melting Point | 129 °C (lit.) |
| Boling Point | 114.35°C (estimate) |
| Flash Point | None |
| Water Solubility | Decomposes in water. |
| Solubility | Acetonitrile (Slightly), DMSO (Slightly) |
| Vapor Presure | 3.8 mm Hg ( 25 °C) |
| Appearance | Crystals |
| Specific Gravity | 4.320 |
| Color | White |
| Exposure Limit | ACGIH: TWA 2.5 mg/m3NIOSH: IDLH 250 mg/m3; TWA 2.5 mg/m3 |
| Merck | 14,10072 |
| Storage Condition | Store at +2°C to +8°C. |
| Stability | Stable. Incompatible with air, moisture. Releases fluorine on decomposition. Contact with combustible material may cause fire. |
| Sensitive | Moisture Sensitive |
| Physical and Chemical Properties | Xenon difluoride (XeF2), also known as difluorinated xenon, molecular weight of 169.30, is a colorless solid, easy sublimation at room temperature and the formation of transparent crystals. Xenon difluoride decomposes in neutral or alkaline solution, is relatively stable in acidic solution, and the aqueous solution has a stimulating odor. The xenon difluoride vapor is colorless and has a foul odor. In the electronics industry, XeF2 is often used as the etching gas of silicon. Because the chemical reaction between XeF2 and silicon is spontaneous, XeF2 has a very high selectivity for the etching process of silicon, in the process of XeF2 etching silicon, XeF2 gas is freely diffused to the surface of the silicon substrate and chemically reacts with the outermost silicon atoms to generate gaseous Xe and gaseous SiF4, thereby, the corrosion of silicon is achieved. |
XENON DIFLUORIDE - Risk and Safety
| Risk Codes | R8 - Contact with combustible material may cause fire R25 - Toxic if swallowed R26 - Very Toxic by inhalation R34 - Causes burns |
| Safety Description | S17 - Keep away from combustible material. S26 - In case of contact with eyes, rinse immediately with plenty of water and seek medical advice. S28 - After contact with skin, wash immediately with plenty of soap-suds. S36/37/39 - Wear suitable protective clothing, gloves and eye/face protection. S45 - In case of accident or if you feel unwell, seek medical advice immediately (show the label whenever possible.) |
| UN IDs | UN 3087 5.1/PG 2 |
| WGK Germany | 3 |
| RTECS | ZE1294166 |
| FLUKA BRAND F CODES | 1-10 |
| TSCA | T |
| HS Code | 28129019 |
| Hazard Note | Oxidising Agent |
| Hazard Class | 5.1 |
| Packing Group | II |
XENON DIFLUORIDE - Reference Information
| EPA chemical information | Information provided by: ofmpub.epa.gov (external link) |
| use | very effective fluorinating agent. |
Last Update：2024-04-10 22:29:15
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